SemiconductorThe fluids employed during the single production steps of semiconductors and printed circuit boards (PCB) are either corrosive or ultra-pure. As our ultrasonic flowmeters are externally mounted, they are ideal for these conditions, and unlike other instruments are not impaired by the low conductivity of the media.

Furthermore, retrofitting of a flowmeter or carrying out spot measurements with portable devices should not require lines to be opened so costly downtimes and the risk of compromising the purity of cleanrooms can be avoided.

OUR SOLUTION : ultrasonic clamp-on flowmeasuring

  • Non-invasive : Measuring from the outside of (existing) pipes
  • Cost effective: No interruption of semiconductor production processes
  • Suitable for flexible and most common pipes
  • Safe : No contact with medium, prevents leakage and contamination
  • Diameter range : 10 – 6500 mm

An important advantage of ultrasonic clamp-on flowmeters is that they are mounted on pipe exteriors. As a result there is no contact with the (possibly hazardous) medium, no pressure loss and the risk of leaks and contamination is minimized. In addition, your semiconductor production will not be endangered, because there are no downtime costs due to defects of inline flowmeters or for installing them.

Many of the fluids in semiconductor production are corrosive or hazardous to health. High strength acids needed to remove excess copper could cause safety and measurement issues for any invasive technology implemented. Our ultrasonic flowmeters are non-invasive, making them completely safe.

Wafer Production

One key part of wafer production is CMP (Chemical Mechanical Planarisation). Our KATflow clamp-on ultrasonic flowmeters can determine the volumes of the abrasive and corrosive slurry used during this process to grind flat and remove microscopic features on a wafer.
Portable and stationary flowmeters can also play an important role during wet cleaning carried out at numerous steps of semiconductor production. Our instruments can measure the flow of every liquid used during these processes, including acids, solvents, surfactants and deionised water.

Circuit Board Production

The majority of printed circuit boards are made by bonding a layer of copper over the entire board from which subsequently unwanted copper is removed (subtractive method) leaving only the desired copper traces.

This method can be broken down into further techiques. During silk screen printing for instance, an ultrasonic flowmeter measures volume flow of etch-resistant inks used to protect the copper foil. Furthermore, clamp-on meters can also measure the amount of the acids used to remove the unwanted copper.

Another essential part in nearly every chemical process step of the CB production is rinsing. It is often thought that this process requires little attention to function properly. However, ineffective rinsing can cause problems such as increasing the number of rejects and costs for waste water treatment.

Efficient rinsing has several advantages. First of all, it will prolong the bath life. A rinsing system that effectively removes enough process solution can also decrease chemical costs and ease the burden on waste treatment systems. A clamp-on flowmeter is an ideal tools to check the volumes of used rinsing liquids and therefore can provide valuable information on how processes can be made more efficient.

  • Precipitants, reducing and replacement agent measuring
  • Pump, valve and inline flowmeter performance verification
  • Waste water discharge calculations
  • Hydrofluoric acid system monitoring
  • Ligands / complexing agents
  • Board rinsing systems
  • Ultrapure water measurement
  • Intel
  • ST Microelectronics
  • Seagate
Halfgeleider | Semiconductor - KATflow 100
KATflow 100

Compact fixed installation flow transmitter

Halfgeleider | Semiconductor - KATflow 150
KATflow 150

Advanced fixed installation clamp-on ultrasonic flowmeter

Halfgeleider | Semiconductor - KATflow 200
KATflow 200

Hand-held clamp-on ultrasonic flowmeter